MICRONAS SENSOR为瑞士MICRONAS公司生产的压阻式压力传感器,量程从2kPa～200kPa。它采用silicon micromachine(硅微机械加工)工艺与集成电路生产工艺相结合,将一层长方形的薄膜作为机械弹性单元集成在硅片上,该膜片将压力转换成应力。为了能做出这层薄膜(见图),采用一种可控制的非匀质刻蚀工艺,在一块硅晶片上同 MICRONAS SENSOR for the Swiss company MICRONAS piezoresistive pressure sensor, measuring range from 2kPa ~ 200kPa. It uses silicon micromachine (silicon micromachining) process integrated circuit manufacturing process combined with a layer of rectangular film as a mechanical elastic unit integrated in the silicon, the diaphragm will be pressure into stress. In order to be able to make this layer of film (see photo), using a controlled non-uniform etching process, a silicon wafer on the same