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研制出一种采用激光扫描与ＣＣＤ探测系统的大型工件平行度、垂直度测量仪，它以稳定的准直激光束为测量基线，配以回转轴系，旋转五角棱镜扫出互相平行或垂直的基准平面，将其与被测大型工件的各面进行比较。在加工或安装大型工件时，可用本仪器测量面间的平行度及垂直度。本仪器采用ＣＣＤ光电探测系统及单片机，直接测出被测点相对于基准平面相应点的高度变化值，最后由计算机根据高度变化值算出平面度、平行度及垂直度，仪器的测量误差在８ｍ以内不大于１７．６μｍ。探测器的高度探测范围为１０ｍｍ。
A large workpiece parallelism and verticality measuring instrument based on laser scanning and CCD detection system is developed, which takes the stable collimated laser beam as the baseline and the rotary axis system. The rotating pentagonal prism sweeps out parallel or perpendicular to each other The datum plane is compared to the faces of the large workpiece under test. In the processing or installation of large workpieces, the instrument can be used to measure the parallelism between the surface and the degree of verticality. The instrument uses CCD photodetection system and single-chip microcomputer, the measured point directly measured relative to the reference point of the corresponding point height changes, and finally calculated by the computer according to height changes in flatness, parallelism and verticality, the instrument measurement error of 8m Within less than 17.6μm. Detector height detection range of 10mm.