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介绍了一种全新的MEMS微型惯性器件,该器件是一种基于热对流原理的热膜式传感器,它利用一个单敏感元件同时测量加速度和角速率。该器件由一个加热器和两组微型温度传感器组成,加热器加热气体形成的热对流气体作为敏感元件,该器件通过微型温度传感器测得的热对流气体的温度差实现加速度和角速率的测量。分析了器件的工作原理,根据仿真结果设计了双层的器件结构,进行了工艺开发,加工出了原理样机。测试表明:该器件同时具备了加速度传感器和角速率传感器的检测功能,很好地验证了设计的可行性。
A new MEMS miniature inertial device is introduced, which is a thermal film sensor based on the principle of thermal convection. It uses a single sensitive element to simultaneously measure acceleration and angular velocity. The device consists of a heater and two sets of miniature temperature sensors. The heater convects the heated convection gas as the sensing element. The sensor measures the acceleration and angular velocity of the convective gas by the miniature temperature sensor. The working principle of the device is analyzed. Based on the simulation results, a double-layer device structure is designed, the process is developed and the prototype is processed. Tests show that: the device has both acceleration sensor and angular rate sensor detection capabilities, a good validation of the feasibility of the design.