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分析了提拉法晶体生长过程中影响滞后变化的因素 ,采用传统PID调节器和计算机辅助控制相结合的办法 ,解决了铌酸锂晶体生长过程中的精确等径控制问题 ,并在大直径铌酸锂晶体生长应用中取得了满意的效果。生长的 76mm直径的铌酸锂晶体 ,生长条纹问题得到很大改善 ,光学均匀性提高了一个量级以上。
The factors influencing the hysteresis variation in the Czochralski crystal growth process were analyzed. The traditional PID regulator and computer-aided control were combined to solve the problem of precise iso-path control during the growth of lithium niobate crystals. Satisfactory results have been achieved in the application of lithium-ion crystal growth. Growing 76mm diameter lithium niobate crystals greatly improve the growth fringe problem and improve the optical uniformity by more than one order of magnitude.