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引言和理论蒸镀膜的光学特性受吸水影响很大,吸水量的多少影响到薄膜动态性能。有关测量真空室进气前后光学特性变化的报告很多,其中都用填充密度作为说明这种动态影响的一个参数。研究表明,如MgF_2和ZnS及Na_3AIF_6这些材料的单层膜,具有柱状和气孔(由底层到上表面)组成的结构。但是,特别是在光学多层膜的情况下,如对ZnS和MgF_2或Na_3AIF_6制的窄带滤光片来说,填充密度并不能完全说明其特性。在此主要就内表面面积和气孔大小的分布,
Introduction and theory The optical properties of the deposited film are greatly affected by the water absorption, the amount of water absorption affects the dynamic properties of the film. There are a number of reports about the changes in optical properties before and after the vacuum chamber has been measured. The fill density is used as a parameter to illustrate this dynamic effect. Studies have shown that monolayers such as MgF 2 and ZnS and Na 3 AIF 6 have a structure of columnar and stomatal pores (from the bottom to the upper surface). However, especially in the case of optical multilayer films, such as narrowband filters made of ZnS and MgF_2 or Na_3AIF_6, the packing density does not fully explain its properties. In this mainly on the inner surface area and pore size distribution,