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Vertical GaN Schottky barrier diodes with TiN anodes were fabricated to investigate the electrical performance.The turn-on voltage and specific on-resistance of diodes are deduced to be approximately 0.41 V and 0.98 mΩ·cm2,respectively.The current-voltage curves show rectifying characteristics under different temperatures from 25 ℃ to 200 ℃,implying a good thermal stability of TiN/GaN contact.The low-frequency noise follows a 1/f behavior due to the multiple traps and/or barrier inhomogeneous at TiN/GaN interface.The trapping/de-trapping between traps and Fermi level causes the slight capacitance dispersion under reverse voltage.