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研究了直流溅射ＺｎＯ薄膜在阴极射线激发下紫外光（约３９０ｎｍ）和绿光（约５２０ｎｍ）的发光与激发电子束电流密度的关系，随激发电流密度增加绿光相对下降，紫外光相对增强，使得ＺｎＯ薄膜的发光颜色从绿变蓝紫．ＺｎＯ薄膜绿光随电子束流密度的增长呈亚线性增长，并在不高的束流密度下达到饱和，而紫外发光随电子束流密度呈超线性增长，这是ＺｎＯ薄膜在室温阴极射线激发下紫外受激发光的迹象．是高密度激发下的一种超辐射受激发光．
The relationship between the luminescence and excitation electron beam current density of DC sputtering ZnO film under the excitation of cathode ray (about 390nm) and green light (about 520nm) was studied. With the increase of the excitation current density, the relative decrease of green light and the relative increase of ultraviolet light , Making the light-emitting color ZnO thin blue to blue. The ZnO green film grows linearly with the increase of electron beam current density and reaches saturation at low beam densities. The UV emission shows a superlinear increase with electron beam current density, which is due to the cathode ray excitation Under ultraviolet light signs of excitation. Is a high-density excitation of a super-radiation stimulated luminescence.