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本文介绍了用碳还原二氧化硅氮化法制取高质量Si_3N_4粉末的工艺过程,讨论了加热温度、反应时间、氮气流速和反应物浓度及添加剂对所获得的Si_3N_4粉末相的影响。结果表明,过量的碳能有效地控制SiO的挥发,提高氮化速度和氮化率。添加剂可以有效地限制β-Si_3N_4相的生成。一定的温度是反应进行的保证,足够的时间是充分反应的条件,氮气流速是氮化的前提。如果严格控制这些工艺条件和影响因素,就可以获得高α相含量的Si_3N_4粉末。
In this paper, the process of preparing high quality Si_3N_4 powder by carbon reduction of silicon dioxide was introduced. The effects of heating temperature, reaction time, nitrogen flow rate, reactant concentration and additive on the Si_3N_4 powder phase were discussed. The results show that excessive carbon can effectively control the volatilization of SiO and improve the nitriding rate and nitriding rate. Additives can effectively limit the β-Si 3 N 4 phase formation. A certain temperature is the guarantee of the reaction, sufficient time is sufficient reaction conditions, nitrogen flow rate is the premise of nitriding. If these process conditions and influencing factors are strictly controlled, Si_3N_4 powder with high α phase content can be obtained.