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为了生长出高质量的定向碳纳米管薄膜 ,研究了反应时间、反应温度等工艺参数对薄膜生长的影响。试验采用二甲苯为碳源 ,二茂铁为催化剂 ,在石英基底上催化裂解生长碳纳米管定向薄膜。通过扫描电子显微镜 (SEM)和透射电子显微镜 (TEM)观察表明 ,得到的薄膜是由定向性良好的多壁碳纳米管 (MWNTs)组成 ,管径为 2 0～ 5 0 nm。反应时间对定向生长的碳纳米管长度有决定性影响 ;随反应时间的增长 ,定向性更好。同时 ,较适合碳纳米管薄膜定向生长的反应温度区间为 10 5 3～ 1113K。而反应温度和反应时间对薄膜中碳纳米管的直径无明显影响。
In order to grow high-quality oriented carbon nanotube films, the effects of process parameters such as reaction time and reaction temperature on the growth of the films were studied. In the experiment, xylene was used as carbon source and ferrocene as catalyst to catalyze the growth of oriented carbon nanotube film on quartz substrate. Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) observations show that the resulting films are composed of highly oriented multi-walled carbon nanotubes (MWNTs) with diameters of 20-500 nm. The reaction time has a decisive influence on the length of CNTs. With the increase of reaction time, the orientation is better. Meanwhile, the suitable reaction temperature range for the directional growth of carbon nanotube films is 1053 ~ 1113K. The reaction temperature and reaction time have no significant effect on the diameter of the carbon nanotubes in the film.