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用正交试验法对BaTiO3薄膜微弧氧化电解液体系进行优化,并对最优电解液体系下所得薄膜的物相组成,元素分布情况、表面形貌及介电性能进行了表征。结果表明,最优电解液体系为0.5 mol/L Ba(OH)2+0.1 g纳米TiO2+0.05 g乙二醇+0.2 g甘油;最优电解液体系下所得薄膜主要由四方相BaTiO3和极少量BaCO3组成,且薄膜表面平整、孔洞分布均匀、孔径细小,其在100 Hz下的介电常数为245.3。
The orthogonal experiment was used to optimize the micro-arc oxidation electrolyte system of BaTiO3 thin film. The phase composition, elemental distribution, surface morphology and dielectric properties of the obtained thin film were characterized. The results show that the best electrolyte system is 0.5 mol / L Ba (OH) 2 + 0.1 g nano-TiO2 + 0.05 g ethylene glycol +0.2 g glycerol. The optimum electrolyte system consists of tetragonal BaTiO3 and a very small amount BaCO3, and the surface of the film is smooth, the holes are evenly distributed and the pore size is small. The dielectric constant at 100 Hz is 245.3.