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利用脉冲YAG激光器对砷注入长波碲镉汞样品进行激光退火 ,分析不同能量密度的激光光束退火所引起的样品表面电学性质的变化。实验表明 ,激光能量密度越大 ,激光退火的效果越明显。我们认为要达到理想退火效果 ,样品表面一薄层需处于近熔化状态 ,以得到晶格结构的重新组织。
The pulsed YAG laser was used to laser anneal arsenic into the long-wave HgCdTe samples, and the changes of the surface electrical properties of the samples were analyzed by laser beam annealing with different energy density. Experiments show that the larger the laser energy density, the more obvious the effect of laser annealing. In our opinion, to achieve the ideal annealing effect, a thin layer on the sample surface needs to be near-melted to obtain the reorganization of the lattice structure.