大家知道,工业上很早就生产按迈克尔逊双光束干涉仪系统设计的接触式干涉仪。这些仪器用来测量量块、光滑量规和其它类似的高精度零部。但是,很少用来测量零件孔的直径。为此,研制出一种接触式干涉仪,其反向环形光路系统不是带一个,而是带两个灵敏元 As we all know, the industry has long been producing a contact interferometer designed for Michelson’s dual-beam interferometer system. These instruments are used to measure gauges, smooth gauges and other similar high-precision parts. However, it is seldom used to measure the diameter of part holes. To this end, developed a contact interferometer, the reverse ring optical system is not with one, but with two sensitive element