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介绍了光电高精度全场形位检测系统。系统以面阵CCD作为被测物体边缘图象的探测器件，应用激光衍射和囹象处理技术进杆被测物体边缘的精确定位，实现了高精度全场形位检测。该系统具有测量速度快，检测精度高及数据处理自动化等特点。
Introduced a photoelectric high-precision full field position detection system. The system uses the area array CCD as the detection device of the edge image of the object to be measured, and uses the laser diffraction and the image processing technology to precisely position the edge of the measured object to achieve the high precision full field shape detection. The system has the characteristics of fast measurement, high detection accuracy and data processing automation.