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本文采用振幅矢量法和复数法来研究椭圆偏光测厚仪的工作原理,并阐明使用该仪器时的数据处理根据和两次消光的条件。
In this paper, the amplitude vector method and the complex number method to study the working principle of elliptical polarization thickness gauge, and clarify the use of the instrument data processing based on and two extinction conditions.