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In order to overcome the problem of oil back-streaming pollution for a vacuum chamber when using mechanical pump with oil (such as Roots pump unit) as rough pump,a semiconductor cold trap that can capture oil vapour has been developed and the satisfied experimental results have been
In order to overcome the problem of oil back-streaming pollution for a vacuum chamber when using mechanical pump with oil (such as Roots pump unit) as rough pump, a semiconductor cold trap that can capture oil vapor has been developed and the satisfied experimental results have been