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Rutile TiO_2 nanoparticles were synthesized using co-precipitation method with an average diameter of ~30 nm TiO_2 nanoparticle device was then fabricated on glass substrate.Aluminum electrodes were defined using photolithography and vacuum evaporation.A suspension of TiO_2 nanoparticles was prepared in isopropanol using ultrasonic agitation.The nanoparticles were deposited between the electrodes.The device was tested by AC electrical measurements at 40%-90%relative humidity(RH).The impedance of the TiO_2nanoparticles decreases by about 80 times with the increase in RH from 40%to 90%at 100 Hz.The response time and the recovery time were 4 s and 5 s,respectively between 40%and 90%RH.At 100 Hz,the sensitivity of the aluminum electrode TiO_2 nanoparticle device in the range of 40%—90%RH was17 MΩ/%RH.Complex modulus analysis also confirms the increase in DC conductivity of TiO_2 nanoparticles as RH increases.
Rutile TiO 2 nanoparticles were synthesized using co-precipitation method with an average diameter of ~ 30 nm TiO 2 nanoparticle device was then fabricated on glass substrate. Aluminum-containing electrodes were defined using photolithography and vacuum evaporation. A suspension of TiO 2 nanoparticles was prepared in isopropanol using ultrasonic agitation The impedance of the TiO 2 nanoparticles decreased by about 80 times with the increase in RH from 40% to 90%. The nanoparticles were deposited between the electrodes. The device was tested by AC electrical measurements at 40% -90% relative humidity (RH). at 100 Hz. The response time and the recovery time were 4 s and 5 s, respectively between 40% and 90% RH. At 100 Hz, the sensitivity of the aluminum electrode TiO 2 nanoparticle device in the range of 40% -90% RH was 17 MΩ /% RH. Complex modulus analysis also confirms the increase in DC conductivity of TiO 2 nanoparticles as RH increases.