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光能量积分器是一种较新型的控制曝光时间的定时器,在国外已被用于光刻机上,象日本Canon公司PLA-500F型接触式自动对准光刻机等系列产品均采用了此项技术.近年来在国内也逐渐地得到了应用,象清华大学研制的ZGK-50型投影自动对准光刻机也采用了此项技术.由于此项技术在国内外有关文献上较详细的分析文章所见不多,本文从理论和应用这两方面对这项技术进行了较详细的分析,从而使读者有一较深入的了解.
Light energy integrator is a relatively new type of timer to control the exposure time, has been used in foreign countries lithography, such as Japan’s Canon PLA-500F contact-type automatic alignment lithography machines and other products are used in this Technology in recent years has gradually been applied in China, like ZGK-50 projection automatic alignment lithography machine developed by Tsinghua University also uses this technology.Because this technology is more detailed in the literature at home and abroad Analysis of the article see much, this article from the theory and application of these two aspects of the technology were more detailed analysis, so that readers have a more in-depth understanding.