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描述并确定具有明显纹理粗糙表面均方根斜率的光散射技术(均方根斜率是联合表面轮廓高度和波长特性的混合参数)。称为散射光锥法(The scattered light-conemethod)的该技术是基于激光角散射检测阵列(DALLAS——Defector Array for Laser LishtAngular Scattering),它用于测量粗糙表面散射光角分布的仪器。均方根斜率是从DALLAS光散射图象的角宽得到的。一般可以发现角宽(即估计的均方根斜率)对光的入射角和散射角变化相当大时是不敏感的。这些结果与表面材料无关,并且对正弦和随机粗糙表面都是有效的。介绍了散射光锥法的测量原理、实验、数据分析和几点结论。
The light scattering technique with a well-defined root-mean-square surface roughness was described and determined (the root-mean-square slope is a blend of the combined surface profile height and wavelength characteristics). The technique called The scattered light-conemethod is based on the DALLAS - Defector Array for Laser Lisht Angular Scattering, an instrument used to measure the angular distribution of light scattered by a rough surface. The root mean square slope is derived from the width of the DALLAS light scattering image. It is generally found that angular width (ie, the estimated root mean square slope) is insensitive to large changes in the angle of incidence and scattering of light. These results have nothing to do with the surface material and are valid for both sinusoidal and random rough surfaces. The measurement principle, experiment, data analysis and some conclusions of scattering cone method are introduced.