随着科学技术的发展,薄膜技术获得了进一步的提高,特别是近二十年来,薄膜技术在各科学技术领域中得到了广泛的应用。例如光学、光谱学、电子技术、原子物理、宇宙技术、半导体技术等领域中已广泛地采用。目前,薄膜的成膜方法很多,就其原理而言,不外乎下述两种:一是以物理为基础的真空镀膜法,一是基于成膜物质在镀件表面上相互间化学反应的化学镀膜法,两者的作用是薄膜赋予镀件本身不具有的光学、化学、电学和 With the development of science and technology, thin film technology has been further improved, especially in the past two decades, thin film technology has been widely used in various fields of science and technology. For example, optical, spectroscopy, electronic technology, atomic physics, cosmology, semiconductor technology and other fields have been widely used. At present, there are many film forming methods, in terms of its principles, nothing more than the following two: First, physical-based vacuum coating method, one is based on the film-forming material on the surface of the chemical reaction between each other Chemical plating method, the role of both the film to give the plating itself does not have the optical, chemical, electrical and