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电子、半导体和精密光学等工业对其所需零件的性能要求越来越高,加工部门必须达到的精度接近于10~(-8)～10~(-9)米的数量级。实现这一指标的具体手段之一,是使用高精度高刚性机床,配以金刚石刀具。这种超精密切削技术20年来有了迅速的进展,“超精密切削技术近况”一文详细叙述了此项技术自六十年代以来的发展过程和今后的动向,原文篇幅较长,本刊摘取其中70年代的部分研究情况,作一概括介绍。
The industries such as electronics, semiconductors and precision optics are demanding more and more of the performance of their components. The precision the processing department must achieve is close to the order of 10 -8 to 10 -9. One of the concrete measures to achieve this indicator is to use high-precision and high-rigidity machine tools with diamond tools. This ultra-precision cutting technology has made rapid progress in the past 20 years, “Ultra-precision cutting technology,” a text detailing the technology since the sixties of the development process and the future trends, the length of the original text, the magazine One part of the 70’s research, make a general introduction.