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理论分析了影响射频/微波MEMS电容开关寿命的因素:介质内的电场强度和可动薄膜对介质膜的冲击速度。用三种不同的偏置电压,对介质内电场强度和可动薄膜对介质膜的冲击速度进行了数值分析和比较。提出了在脉冲电压作用下,可得到可动薄膜对介质膜最小的冲击速度和介质内的最小电场强度,从而极大地提高MEMS电容开关运行的可靠性和寿命。实验验证了上述结论。
The factors influencing the life of the RF / MEMS MEMS switch are theoretically analyzed: the electric field strength in the medium and the impact velocity of the movable film on the dielectric film. Three different bias voltages were used to analyze and compare the electric field strength in the medium and the impact velocity of the movable membrane on the dielectric membrane. It is proposed that under the action of pulse voltage, the minimum impact strength of the movable membrane on the dielectric film and the minimum electric field strength in the medium can be obtained, which greatly improves the reliability and the life of MEMS capacitive switch. The experimental results verify the above conclusion.