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利用光刻自组装技术在玻璃基板上成功制备出图案化的BiFeO3薄膜.AFM和接触角测试表明,紫外光照射引起十八烷基三氯硅烷(OTS)单层膜改性,形成憎水的自组装单分子(SAM)区域和亲水的硅烷醇区域;XRD和XPS结果显示,OTS单层膜和紫外照射处理的玻璃基板表面诱导吸附的薄膜为纯相六方扭曲钙钛矿结构的BiFeO3薄膜;SEM和EDS表明,SAM区域沉积的BiFeO3薄膜不连续,在超声波震荡下容易脱落,而硅烷醇区域沉积的BiFeO3薄膜致密均一,与基底结合牢固,边缘轮廓清晰.
The patterned BiFeO3 thin films were successfully fabricated on glass substrates by photolithography self-assembly technique.AFM and contact angle measurements showed that UV irradiation led to the modification of monolayers of octadecyltrichlorosilane (OTS) to form hydrophobic X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The results show that the films adsorbed on the surface of OTS monolayers and UV-irradiated glass substrates are BiFeO3 films with pure hexagonal twisted perovskite structure SEM and EDS showed that the BiFeO3 thin films deposited in the SAM region were discontinuous and dropped off easily under ultrasonic vibration. The BiFeO3 thin films deposited in the silanol region were dense and uniform, and the solid BiFeO3 films were firmly bonded to the substrate and the edge profile was clear.