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两抛光平面间平行差测量是光学行业、也是机械行业中经常遇到的问题,一般用自准测角仪测量,其精度通常在2″～4″左右;如用等厚或等倾干涉法测量,其精度一般也只能达到1″左右,而且对工作环境有较严的要求。本文介绍的激光点光源干涉法乃是根据早已周知的点光源干涉(或称菲涅尔型干涉)原理,利用氦氖激光的良好相干性,简易地实现由被测件(例如平板玻璃)前后两表面反射而产生的两点光源干涉现象,通过测量干涉圆环中心的偏移量,间接求出被测件两表面平行差的测量方
The measurement of the parallel difference between the two polishing planes is the optical industry, and is also a problem often encountered in the machinery industry. Generally, it is measured with a self-calibration goniometer, and its accuracy is usually around 2 “~ 4” Measurement, the accuracy is generally only about 1 ", but also to the working environment has more stringent requirements.In this paper, laser point light source interference method is based on the already well-known point light interference (or Fresnel type interference) principle , By using the good coherency of He-Ne laser, the interference of two light sources caused by the reflection of the two surfaces before and after the device under test (such as flat glass) can be easily realized. By measuring the offset of the center of the interference ring, Measuring surface parallel to the difference between the measuring side