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针对纳米压入仪上普遍使用Berkovich三棱锥压头，本文分别考虑理想与纯化两种压头尖端几何情况，并使用三维弹塑性大应变有限元分析软件ABAQUS，对沉积在陶瓷基体上金属薄膜的纳米压入加载过程进行模拟计算，建立了膜、基材料基本力学性能参量及压头相对钝化量同纳米区入加载曲线间的函数关系，进而提出了利用纳米压入仪测得的连续压入加载曲线确定陶瓷基体上金属薄膜屈服强度和硬化指数的一般方法
In view of the common Berkovich triangular pyramid pressure head used in the nano-indenter, this paper respectively consider the geometry of two ideal and indenter tips, and use the three-dimensional elasto-plastic finite element analysis software ABAQUS to deposit the metal film deposited on the ceramic substrate Nanoindentation loading process to simulate the calculation, the basic mechanical properties of the membrane, the basic material properties and the relationship between the relative passivation of the indenter and the loading curve in the nanometer area are established. Then the continuous pressure The general method of determining the yield strength and hardening index of metal film on a ceramic substrate by loading curve