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本文叙述用ZnO膜制作声光布喇格偏转器。单晶ZnO膜是用RF磁控溅射法生长在兰宝石基片上,测得了对波长为0.63μm制导激光束的衰减约1.2dB/cm和对SAW一阶高次模(1st)的机电耦合系数k~2约4％。利用ZnO膜的这些优良特性实现了频率为1GHz SAW输入功率为1W的、衍射效率为50％的声光布喇格偏转器。适当设计叉指换能器(IDT)就能够使这种声光偏转器实现宽带声光布喇格偏转器。
This article describes the use of ZnO film to produce acoustic Bragg deflector. Single crystal ZnO films were grown on sapphire substrates by RF magnetron sputtering. The decay of the guided laser beam with a wavelength of 0.63 μm was observed to be about 1.2 dB / cm and the electromechanical coupling to the SAW first order high order mode (1st) The coefficient k ~ 2 is about 4%. The use of these excellent properties of ZnO film to achieve a frequency of 1W SAW input power of 1W, the diffraction efficiency of 50% of the Acousto-optic Bragg deflector. Proper design of IDTs enables this acousto-optic deflector to achieve a broadband acousto-optic Bragg deflector.