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利用磁控溅射法制备了Nd28Fe66B6/Fe50Co50双层纳米复合磁性薄膜,研究了其结构和磁性.经873K退火处理15min后,利用x射线衍射仪测定薄膜晶体结构,采用俄歇电子能谱仪估算薄膜厚度和超导量子干涉仪测量其磁性.磁性测量表明,1)该系列薄膜具有垂直于膜面的磁各向异性.从起始磁化曲线和小回线的形状特征可知,矫顽力机制主要是由畴壁钉扎控制.2)对于固定厚度(10nm)层的硬磁相Nd-Fe-B和不同厚度(dFeCo=1—100nm)层软磁相FeCo双层纳米复合膜,剩磁随软磁相FeCo厚度的增加快速增加,而矫顽力则减少.当dFeCo=5nm时,最大磁能积达到160×103A/m.磁滞回线的单一硬磁相特征说明,硬磁相Nd-Fe-B层和软磁相FeCo层之间的相互作用使两相很好地耦合在一起.剩磁和磁能积的提高是由于两相磁性交换耦合所致.
The structure and magnetic properties of Nd28Fe66B6 / Fe50Co50 nanocomposite magnetic thin films were investigated by magnetron sputtering. The structure and magnetic properties of the thin films were investigated by X-ray diffractometry after annealing at 873K for 15min. Auger electron spectroscopy The film thickness and superconducting quantum interferometer measure its magnetic properties.The magnetic measurements show that 1) the series of films have perpendicular magnetic anisotropy to the film surface.From the initial magnetization curve and the shape characteristics of the small loop, the coercivity mechanism Mainly by domain wall pinning.2) For the hard magnetic phase Nd-Fe-B with fixed thickness (10nm) and FeCo double-layer nanocomposite with different thickness (dFeCo = 1-100nm) When FeFeCo = 5nm, the maximum energy product reaches 160 × 103A / m. The single hard magnetic phase of the hysteresis loop shows that the hard magnetic phase Nd The interaction between the Fe-B layer and the soft magnetic phase FeCo layer causes the two phases to couple well together, and the increase of residual and magnetic energy products is due to the two-phase magnetic exchange coupling.