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在316L不锈钢片表面上用离子束辅助沉积（IBAD）和溅射沉积加上离子注入方法制备Si-C薄膜．测量氚通过钢片的渗透率，并用XPS、AES、XRD及TEM等分析薄膜的成分和结构．结果表明，改性膜使不锈钢的氚渗透率降低近5个数量级．随着制备条件的不同，膜中的C/Si原子比不同．用双靶（Si，C）加C离子轰击的IBAD方法可得到较高的C/Si比．改性膜中形成了Si-C化学键，Si-和C-悬键的存在可能是捕陷氚使之不易扩散的原因．
Si-C films were prepared on the 316L stainless steel sheet by ion beam assisted deposition (IBAD) and sputter deposition plus ion implantation. The permeability of tritium through the steel sheet was measured and the composition and structure of the film were analyzed by XPS, AES, XRD and TEM. The results show that the modified membrane reduces the tritium permeability of stainless steel by nearly 5 orders of magnitude. With different preparation conditions, the C / Si atomic ratio in the film is different. The IBAD method with dual target (Si, C) plus C ion bombardment gives a higher C / Si ratio. Si-C chemical bonds are formed in the modified film, and the existence of Si- and C-dangling bonds may be the reason that tritium can not easily diffuse.