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Ｌａｎｇｍ ｕｉｒ探针是诊断等离子体荷电粒子参数的重要手段。本文首次报道了用加热的调谐探针，在抑制了对探针的射频干扰和“中毒效应”之后，对探针Ｉ－Ｖ 曲线的统计涨落噪声进行了数字滤波的光滑化处理，获得了射频辉光放电硅烷等离子体的电子能量分布函数，平均能量（温度）和浓度等重要参数。
The Langmuir probe is an important tool to diagnose plasma charged particle parameters. This paper reports for the first time the use of heated tuned probes to smooth the statistical fluctuations of the I-V curve of the probe by digital filtering after suppressing RFI and “poisoning” on the probes, resulting in RF glow discharge silane plasma electron energy distribution function, the average energy (temperature) and concentration and other important parameters.