高温超导体在各领域的应用越来越受到人们的重视,特别是在微电子学、微波器件和磁测量等方面比如延迟线、滤波器、超导天线、超导量子干涉仪(SQUID)已进入实用化阶段.制作这些器件不仅要求超导体为大面积的薄膜,而且要求膜的厚度以及超导特性(零电阻温度,临界电流密度,表面电阻等)具有很好的均匀性.虽然目前制备高T_c氧化物薄膜的方法很多,脉冲激光沉积(pulsed laser deposition)、磁控溅射(magnetron-spuffering),金属有机化学气 Applications of high temperature superconductors in various fields are receiving more and more attention, especially in the fields of microelectronics, microwave devices and magnetic measurements such as delay lines, filters, superconducting antennas and superconducting quantum interferometers (SQUIDs) Practical stage.Constructing these devices not only requires the superconductor is a large area of ​​the film, but also requires the thickness of the film and superconducting properties (zero resistance temperature, critical current density, surface resistance, etc.) with good uniformity.Although the current preparation of high T_c There are many methods of forming oxide thin films, pulsed laser deposition, magnetron-spuffering, metal organic chemical gases