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用磁控溅射的方法在透明导电氧化物衬底上制备了CdS薄膜,制备时的衬底温度为30~200℃.X射线衍射测试结果表明在这一条件下制备的CdS薄膜是六角纤锌矿的多晶结构.扫描电子显微镜结果显示薄膜具有较好的晶体质量,这一结论也和拉曼光谱、紫外-可见吸收光谱、光致发光光谱的结果一致.拉曼光谱显示CdS薄膜内部的压应力随着制备温度的提高而增大.
CdS thin films were prepared on the transparent conductive oxide substrate by magnetron sputtering, the substrate temperature was 30 ~ 200 ℃ .The results of X-ray diffraction showed that the CdS thin films prepared under this condition were hexagonal fibers The results of scanning electron microscopy (SEM) show that the film has better crystal quality, which is also consistent with the results of Raman, UV-visible and PL spectra. Raman spectroscopy shows that the CdS film The compressive stress increases with the preparation temperature.