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尝试在大型衍射光栅刻划机中使用气浮导轨承载金刚石刻划刀具系统运行。气浮导轨同时承担刀具系统的承重与导向任务,由于使用气体作为润滑剂而接近零摩擦状态,可以避免触点磨损及低速爬行现象。分析了气浮导轨工作过程中产生的误差及该误差对刻划刀具运动轨迹的影响,并使用双频激光干涉仪测量刻划过程中刻划刀具运动的直线度误差。测量结果表明,金刚石刀具系统单向行程400 mm时,该误差约为200 nm,小于使用石英导轨承载刀具系统时的误差,同时在高频振动方面有明显改善。刻制一段79 gr/mm,400 mm×500 mm的中阶梯光栅,观察其衍射光斑并使用照度计检测得其不同位置杂散光强度为0.2‰~5‰,实验结果表明使用气浮导轨承载刻划刀具可以满足光栅刻划精度要求。
Attempts to operate a diamond scoring tool system using an air bearing in a large diffraction grating scoring machine. Air bearing simultaneously bear the load bearing and guidance system tasks, the use of gas as a lubricant close to zero friction state, to avoid contact wear and low speed crawling phenomenon. The error caused by the working process of the air-floating guide rail and the influence of the error on the movement path of the cutting tool are analyzed. The straightness error of the tool movement during the marking process is measured by the dual-frequency laser interferometer. The measurement results show that the error of the diamond tool system is about 200 nm when the unidirectional stroke is 400 mm, which is smaller than the error when using the diamond guide to carry the tool system. At the same time, there is a significant improvement in high frequency vibration. An intermediate graded grating with a length of 79 gr / mm and a width of 400 mm × 500 mm was engraved. The diffracted light spots were observed and the stray light intensities at different positions were measured with a luminometer from 0.2 ‰ to 5 ‰. The experimental results show that using the air bearing Cutter can meet the grating grating precision requirements.