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微波等离子体化学气相沉积法(MPCVD)是制备高品质金刚石膜的重要方法,而MPCVD技术的关键是其设备核心部件谐振腔的设计。本文基于目前广泛应用的圆柱式和椭球式两种MPCVD谐振腔中微波传输的特点和其各自的优点,提出了一种重入式微波谐振腔的设计构想,并利用数值模拟的方法对这一构想进行了验证。模拟的结果表明,微波在重入式微波谐振腔内外壁之间的路径传输后,可在金刚石膜沉积台处形成一最强且相对均匀的电场。在相同的输入功率下,其形成的最大电场强度高于圆柱式和椭球式两种谐振腔时的情况。由于重入式的微波谐振腔具有结构简单、频率易于调节的优点,因而这一构想可为设计制造新型的MPCVD金刚石膜沉积设备提供参考依据。
Microwave plasma chemical vapor deposition (MPCVD) is an important method for preparing high quality diamond films. The key of MPCVD technology is the design of the resonator of its core components. In this paper, based on the characteristics of the microwave transmission in the two kinds of MPCVD resonators, which are widely used nowadays, and their respective advantages, a design concept of reentrant microwave resonator is proposed. The numerical simulation method A concept has been validated. The simulation results show that the microwave can form a strongest and relatively uniform electric field at the diamond film deposition station after the microwave is transmitted between the inner and outer walls of the re-entrant microwave cavity. Under the same input power, the maximum electric field intensity formed is higher than that of both cylindrical and ellipsoidal resonant cavities. Because of the advantages of simple structure and easy adjustment of frequency, the re-entry microwave resonator provides a reference for designing and manufacturing new MPCVD diamond film deposition equipment.