论文部分内容阅读
扼要介绍947型氦质谱检漏仪的工作原理、故障原因及排除。1引言 947型氦质谱检漏仪是美国Varian公司生产一种高精度、高灵敏度的专业检测设备,是基于微处理器控制的智能型检漏仪,用于检测已封装的电子器件的微小漏孔。
Briefly introduce the working principle of the 947 helium mass spectrometer leak detector, the cause of the malfunction and its exclusion. 1 Introduction 947 helium mass spectrometer leak detector is the United States Varian company to produce a high-precision, high sensitivity of professional testing equipment is based on microprocessor-controlled smart leak detector for detecting the tiny electronic devices have been leaked hole.