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根据磁控溅射中海绵的传动特性,建立了传动控制的数学模型,采用带有矢量的变频调速器实现了海绵卷绕真空镀膜过程中的张力控制,满足了磁控溅射中海绵卷绕的传动要求。
According to the transmission characteristics of sponge in magnetron sputtering, a mathematical model of transmission control was established. The frequency control of the sponge winding was used to realize the tension control in sponge winding vacuum coating process. The magnetron sputtering sponge volume Winding drive requirements.