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一、前言吸收散射的损耗会严重降低光学薄膜元件的质量,对于激光高反板尤其如此。经验表明,对于低增益的氦氖激光器,当高反板反射率 R 在百分之99点几时,反射率若提高0.1%,则输出功率可以增加10%,因而降低膜层损耗,提高反射率的问题,受到了人们的普遍重视。硬膜元件膜层牢固,可以擦拭,物理化学性能稳定,抗激光破坏阈值高。它能承受400～500℃的高温,能满足硬封结的需要,从而可以大幅度地提高激光器的寿命。制造硬膜元件的重要问题是硬膜膜料的蒸镀工
I. INTRODUCTION Absorption and scattering losses seriously degrade the quality of optical thin-film components, especially for high-reflective lasers. Experience has shown that for low-gain HeNe lasers, the output power can be increased by 10% with a reflectivity R of 99% at a high reflectivity R of 99%, thus reducing film loss and increasing reflectivity The issue has received universal attention. Hard film components firm film, you can wipe, stable physical and chemical properties, anti-laser damage threshold high. It can withstand 400 ~ 500 ℃ high temperature, can meet the needs of hard seal, which can greatly improve the life of the laser. An important issue in the manufacture of dural elements is the deposition of dural material