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简要介绍利用不同波段的微型滤光片和不同响应波段的多元HgCdTe红外探测器,叙述了通过精密镶嵌技术组合而成的四波段215~225μm、84~89μm、103~113μm和115~125μm88元多元多色探测器的设计原理和特性,以及多元多色探测器的组合工艺,并给出了各个通道的响应光谱特性和探测器的工作性能。研制成功的88元多色红外探测器每个通道的平均探测率和响应率分别为:D2.15~2.25=1.2×1012cmHz1/2/W和R2.15~2.25=5.0×106V/W,D8.4~8.9=7.0×1010cmHz1/2/W和R8.4~8.9=1.6×104V/W,D10.3~11.3=4.0×1010cmHz1/2/W和R10.3~11.3=4.3×103V/W,D11.5~12.5=3.0×1010cmHz1/2/W和R11.5~12.5=3.3×103V/W,文中对这些结果进行了分析和讨论。
This paper briefly introduces the multi-element HgCdTe infrared detectors with different wavelength bands and different response bands. The four bands of 215 ~ 225μm, 84 ~ 89μm, 10 ~ 3 ~ 11 3μm and 11 5 ~ 12 5μm88 yuan multicolor multi-color detector design principles and characteristics, as well as the combination of multiple polychromatic detector technology and gives the response of each channel spectral characteristics and detector Work performance. The average detection rate and response rate of each channel of the developed 88-element multicolor infrared detector are respectively: D * 2.15 ~ 2.25 = 1.2 * 1012cmHz1 / 2 / W and R2.15 ~ 2.25 = 5.0 × 10 6 V / W, D × 8.4 to 8.9 = 7.0 × 10 10 cm -1 / 2 / W and R 8.4 to 8.9 = 1.6 × 10 4 V / W, D × 10.3 ~ 11.3 = 4.0 × 1010cmHz1 / 2 / W and R10.3 ~ 11.3 = 4.3 × 103V / W, D11.5 ~ 12.5 = 3.0 × 1010cmHz1 / 2 / W And R11.5 ~ 12.5 = 3.3 × 103V / W, these results are analyzed and discussed in this paper.