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主要介绍了一种全新的设计方法,在标准的EDA设计环境里、采用可重复使用的MEMS设计库单元,使设计者能够对MEMS产品的工艺可行性作分析。这种设计方法是MEMS开发单位采用“面向加工的设计方法”的重要基础。
A new design methodology is introduced, using a reusable MEMS design library unit in a standard EDA design environment to enable designers to analyze process feasibility of MEMS products. This design approach is an important foundation for MEMS development organizations to adopt a “process-oriented design approach.”