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图1是由永久磁铁、磁路及磁流体密封件所组成的磁流体密封结构和原理图。从图中可以看到,在强磁力作用下的磁流体(存留于密封槽端与转轴之间)能阻止气体、烟雾、蒸气及其他污物通过,达到预期的密封要求。随着半导体制造业的发展,磁流体密封已获得成功的应用——特别对真空密封——并显示出其可靠性高、寿命长和适用于高速运转等特性。磁流体是指含有直径约100A(0.01微米)的磁性粒子的液体。磁性粒子在液体中呈胶态
Figure 1 is a permanent magnet, magnetic circuit and magnetic fluid seal composed of magnetic fluid seal structure and schematic diagram. It can be seen from the figure that the magnetic fluid under the strong magnetic force (remaining between the end of the sealing groove and the rotating shaft) can prevent gas, smoke, steam and other contaminants from passing and achieve the desired sealing requirement. With the development of the semiconductor manufacturing industry, the magnetic fluid seal has been successfully used - especially for vacuum sealing - and shows its high reliability, long life and suitable for high-speed operation and other features. Magnetic fluid refers to a liquid containing magnetic particles having a diameter of about 100A (0.01 microns). Magnetic particles are colloidal in liquid