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误差滤波和分离技术是超精密加工中的关键技术之一。采用误差递减法修正加工路径,利用修正的高斯权函数对测量表面进行滤波处理,设计并完成了整个误差递减系统,实现非球面的超精密车削加工,并在很大程度上提高其表面精度(P-V值)。通过实验验证,利用该加工方法,提高了加工效率,可明显地提高非球面的表面精度,最终达到面形精度小于200nm。
Error filtering and separation technology is one of the key technologies in ultra-precision machining. The error reduction method is used to correct the machining path, and the corrected Gaussian weight function is used to filter the measurement surface. The entire error reduction system is designed and completed to realize the aspheric ultra-precision turning machining. The surface precision is greatly improved PV value). Through the experimental verification, the processing method is used to improve the processing efficiency, and the surface precision of the aspheric surface can be obviously improved, and finally the surface area accuracy is less than 200 nm.