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化学气相沉积金刚石膜具有优异性能,在高新技术领域有着广泛应用。本文从国内外专利文献方面着重分析化学气相沉积金刚石膜技术研究与应用进展。
Chemical vapor deposition of diamond film has excellent performance, has been widely used in high-tech fields. This article focuses on the research and application of CVD diamond film technology from domestic and foreign patent literature.