MOCVD技术目前已开始用于半导体激光器制作,但在生长通信发光二极管(LED)中,所生长的薄膜,其品格质量极差,因而得不到足够的输出功率,所以一般均采用LPE工艺。但LPE技术生产效率低,工序复杂,造成器件价格昂贵。鉴于目前LED应用需求激增,迫切需要进一步降低LED价格。 MOCVD technology has been used for semiconductor laser fabrication at present. However, in growth communication light emitting diodes (LEDs), the grown films have poor quality and can not obtain sufficient output power, so LPE process is generally adopted. However, the LPE technology has the disadvantages of low production efficiency and complex processes, resulting in expensive devices. In view of the current surge in demand for LED applications, there is an urgent need to further reduce the price of LED.