论文部分内容阅读
本文在介绍供电系统及其主要技术参数和调试概况的基础上,着重分析了电源参数与等离子体参数间的关系,叙述了获得平衡稳定等离子体的调试过程,并对供电回路的退耦方法进行了初步探讨。
This paper introduces the power supply system and its main technical parameters and debugging profiles based on the analysis of the relationship between the power parameters and plasma parameters, describes the process of obtaining a balanced and stable plasma debugging, and the power supply circuit decoupling method A preliminary discussion.