所有的机械导轨运动副都具有三个回转自由度或称作为角运动误差,包括俯仰角、偏摆角和滚转角误差,其中滚转角由于其产生的特别原因,而最难测量。针对现有的以对称的双楔角棱镜和对称的双楔面反射镜组成的滚转角测量干涉仪,提出了利用单楔角和单楔面反射镜的高精密滚转角测量干涉仪系统。由于系统所需光学元件较少,在实现相同测量分辨率的情况下,更有利于光学元件的加工和安装调试。系统中不同频率的两束光的传播路径相互平行,因此能够有效地减小死程误差和排除其他自由度的干扰,系统稳定性更好。使用普通的2π/512细分相位计,滚转角测量分辨率为2μrad。 All mechanical guideway pairs have three degrees of freedom of rotation or are referred to as angular movement errors, including pitching, yawing and roll angle errors, where the roll angle is the most difficult to measure due to its particular causes. Aiming at the existing roll angle measurement interferometer composed of symmetrical double wedge prism and symmetrical double wedge mirror, a high precision roll angle measuring interferometer system using single wedge and single wedge mirror is proposed. As the system requires fewer optical components, in the case of the same measurement resolution, more conducive to optical components processing and installation. The propagation paths of the two beams of different frequencies in the system are parallel to each other, so the dead-line error can be effectively reduced and the interference of other degrees of freedom can be eliminated, and the system stability is better. Using a normal 2π / 512 subdivision phase meter, the roll angle measurement resolution is 2μrad.