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通过对腐蚀溶液的优化,获得了一种刻蚀效果良好的锆钛酸铅(PZT)薄膜的腐蚀溶液配方。文中所采用的PZT薄膜是通过溶胶!凝胶(sol-gel)法获得的,在研究腐蚀溶液组分、温度以及浓度对腐蚀速率影响的基础上,成功获得了PZT薄膜微图形化的湿法腐蚀工艺。通过实验研究,获得了横向和纵向腐蚀速率随温度和浓度变化曲线,侧蚀比(横比纵)小于1:1.07,且图形表面无残留物。
By optimizing the etching solution, an etching solution of lead zirconate titanate (PZT) thin film with good etching effect was obtained. The PZT thin film used in this paper was obtained by sol-gel method. Based on the study of the influence of the composition, temperature and concentration of etching solution on the corrosion rate, the PZT thin film was successfully wet-coated Corrosion process. Through experimental study, the curves of horizontal and vertical corrosion rate with temperature and concentration were obtained. The side etching ratio (longitudinal ratio) was less than 1: 1.07, and there was no residue on the surface of the pattern.