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一、引言次级离子质谱(Secondary Ion Mass spectrometry,简称SIMS)是七十年代新发展起来的一种表面分析技术。X光光电子能谱(ESCA)和俄歇电子能谱(AES)分别是由从表面发出的光电子和俄歇电子的能量大小来获得有关表面的组成和结构等信息的,而次级离子质谱SIMS则由从表面溅蚀(Sputter)出来的次级离子的组成来获得有关表面的信息。ESCA通常给出表面上4—30层厚度内的综合信息以及它们不能检测表面上的氢,而SIMS却能给出表面最外面的第一层的信息和
I. INTRODUCTION Secondary ion mass spectrometry (SIMS) is a newly developed surface analysis technique in the seventies. X-ray Photoelectron Spectroscopy (ESCA) and Auger Electron Spectroscopy (AES) respectively obtain information on the composition and structure of the surface by the amount of energy of the photoelectrons and Auger electrons emanating from the surface, and the secondary ion mass spectrometry SIMS Information about the surface is obtained from the composition of the secondary ions coming out from the surface of the sputter. ESCA generally gives general information in the 4-30 layer thickness on the surface and they can not detect hydrogen on the surface, whereas SIMS gives the first layer of information on the outermost surface