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基于放电激励方法建立了高温环境下MEMS微构件动态特性测试系统,该系统主要由激励装置、激光多普勒测振仪、微构件温度控制系统组成.激励装置利用尖端放电产生的激波激励微构件,通过进给机构调节电极间距以改变激励能量.激励底座是用高温胶粘接而构成的多层结构,包括微构件安装板、十字载台、陶瓷绝缘片和板电极.微构件胶粘在底座上,其振动响应信号由多普勒测振仪测量,计算机对测量数据频谱分析后得到谐振频率.编写了基于LabVIEW的微构件温度控制软件,控制测试时温度.利用该测试系统,测试了微构件在室温~500℃环境下的谐振频率,得到了谐振频率随温度变化规律.
Based on the discharge excitation method, the dynamic characteristic test system of MEMS micro-component under high temperature environment is established. The system mainly consists of excitation device, laser Doppler vibrometer and micro-component temperature control system. The excitation device uses the shock excitation micro Components, through the feed mechanism to adjust the electrode spacing in order to change the excitation energy. Excitation base is a multi-layer structure composed of high temperature adhesive bonding, including micro-component mounting plate, cross-platform, ceramic insulating sheet and plate electrode. At the base, the vibration response signal is measured by the Doppler vibrometer, and the computer obtains the resonance frequency after the spectral analysis of the measurement data. The software for controlling the temperature of the micro-component based on LabVIEW is programmed to control the temperature during the test. With this test system, The resonant frequency of the micro-component at room temperature ~ 500 ℃ was obtained.