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用微电子平面工艺制备了带宽相边长分别为10、20、30μm的带形和正方形微电极阵列(BMEA和SMEA)。在K_3Fe(CN)_6溶液中研究了它们的电化学特性。边长为10μm的SMEA(工作电极总面积仅为9×10~(-3)mm~2)有最大的电流密度(12.1μA/mm~2)和最短的响应时间(5s)。同一硅片中任选5个SMEA其H_2O_2工作曲线的线性范围为0.1～5mmol/L,平均斜率为220nA/mmol/L,斜率的相对标准偏差为16.1％。这些特性可能使它成为生物传感器的重要基础元件。
The strip-shaped and square-shaped microelectrode arrays (BMEA and SMEA) with 10, 20 and 30 μm bandwidths were prepared by microelectronic planarization. Their electrochemical properties were investigated in K_3Fe (CN) _6 solution. SMEA with a side length of 10μm has a maximum current density (12.1μA / mm ~ 2) and shortest response time (5s) with a total working electrode area of only 9 × 10 ~ (-3) mm ~ 2. The linear range of the H_2O_2 working curve of five optional SMEs in the same silicon wafer was 0.1-5 mmol / L, the average slope was 220 nA / mmol / L, and the relative standard deviation of slope was 16.1%. These characteristics may make it an important basic element of biosensors.