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一、引言自十三年前西德与瑞典涂覆TiC的硬质合金刀具进入市场以来,涂覆刀具有了很大的发展。最初为TiC、TiN的单体涂层,后来发展为Ti(CN)、TiN-TiC、TiC-Al_2O_3等复合涂层。涂层的制备工艺,从化学气相沉积(CVD)发展到离子镀(IP)。活化反应蒸发(ARE)及低压等离子体沉积(LPPD)等物理气相沉积(PVD)法。目前国外汽车制造工业中,涂覆刀具约占30%以上,在国际刀具市场上出售的不重磨刀头,大部分是用TiC、TiN及Al_2O_3涂覆的。
I. INTRODUCTION Since the TiC and Swedish TiC-coated cemented carbide tools entered the market 13 years ago, coated knives have made great progress. Initially TiC, TiN monomer coating, later developed into Ti (CN), TiN-TiC, TiC-Al_2O_3 and other composite coatings. The coating preparation process, from chemical vapor deposition (CVD) to ion plating (IP). Physical vapor deposition (PVD) methods such as reactive gas evaporation (ARE) and low pressure plasma deposition (LPPD). At present, foreign car manufacturing industry, coating cutter about 30%, in the international tool market for sale without regrind, mostly with TiC, TiN and Al 2 O 3 coating.