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氮碳薄膜由于具有优良物化性能,受到关注,已能采用多种方法获得CN_r薄膜,并对其物性进行了广泛的研究。然而,在考虑其热行为时,多集中于沉积过程中衬底温度的影响。但是,在空气中长时间等温退火后氮碳薄膜的热行为、物性变化和薄膜结构之间的关系,特别是,经加热处理,是否会导致某种价键结构或元素价态变化,从而改变薄膜的性能,并不十分清楚。本文报道了应用XPS,IR和可见-紫外光吸收谱等实验方法,分析了样品经热处理后,其成分和元素价键结构的变化,并对其光学性质进行了测量,对其结构和物性关系进行了探讨。
Due to their excellent physico-chemical properties, nitrogen-carbon thin films have drawn much attention and CNR films have been obtained by various methods. Their properties have been extensively studied. However, when considering its thermal behavior, much attention has been paid to the effect of substrate temperature during deposition. However, the relationship between the thermal behavior, physical properties and film structure of the carbon-carbon thin films after prolonged isothermal annealing in the air, and in particular, whether the heat treatment causes a change in the valence state of the valence bond structure or the element, The performance of the film is not very clear. In this paper, the experimental methods of XPS, IR and UV-Vis absorption spectra were used to analyze the change of the structure and the valence bond structure of the sample after heat treatment. The optical properties of the sample were measured. The relationship between structure and physical properties Discussed.