论文部分内容阅读
磁流变确定性修形具有高精度、高效率、高表面质量以及近零亚表面损伤的特点。介绍了磁流变修形技术的基本原理和方法,并对磁流变修形中涉及的关键技术进行了讨论。在自研的磁流变修形设备上采用水基磁流变抛光液对一块直径80mm的K9玻璃平面进行了磁流变修形实验。经过一次迭代修形(4.39min)使其面形精度峰谷(PV)误差由初始的0.144λ改善到0.06λ(λ=632.8nm),均方根(RMS)误差由初始的0.031λ改善到0.01λ,面形收敛率达到2.81,表面粗糙度RMS值达到0.345nm。实验结果表明,采用磁流变进行光学表面修形,面形收敛快,面形精度高,表面质量好,可广泛应用于高精度光学镜面加工。
Magneto-rheological determinations with high precision, high efficiency, high surface quality and near-zero subsurface damage characteristics. The basic principle and method of magnetorheological modification technology are introduced, and the key technologies involved in magnetorheological modification are discussed. In a self-developed magnetorheological modification equipment, a water-based magnetorheological fluid was used to modify a piece of K9 glass with a diameter of 80mm. After one iteration (4.39min), the error of area shape accuracy peak-valley (PV) was improved from the initial 0.144λ to 0.06λ (λ = 632.8nm), and the RMS error was improved from the initial 0.031λ 0.01λ, surface shape convergence rate of 2.81, surface roughness RMS value of 0.345nm. The experimental results show that the use of magneto-rheological optical surface modification, shape fast convergence, high precision surface shape, surface quality, can be widely used in high-precision optical mirror surface processing.